Issued Patents All Time
Showing 26–50 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892949 | Imprint method, imprint apparatus, and article manufacturing method | Kazuki Nakagawa, Yosuke Murakami, Takahiro Matsumoto | 2018-02-13 |
| 9851634 | Imprint apparatus | Yozo Matsuda, Mitsuru Hiura, Tatsuya Hayashi | 2017-12-26 |
| 9594301 | Imprint apparatus and article manufacturing method using same | Tatsuya Hayashi, Yosuke Murakami, Hirotoshi Torii, Yusuke Tanaka | 2017-03-14 |
| 9566741 | Imprint method, imprint apparatus, and article manufacturing method | Kazuki Nakagawa, Yosuke Murakami, Takahiro Matsumoto | 2017-02-14 |
| 9523926 | Exposure apparatus and device manufacturing method | Atsushi Umemura | 2016-12-20 |
| 9400426 | Imprint apparatus | Zenichi Hamaya, Setsuo Yoshida, Yoshihiro Shiode | 2016-07-26 |
| 9285675 | Imprint apparatus | Zenichi Hamaya, Setsuo Yoshida, Yoshihiro Shiode | 2016-03-15 |
| 9234738 | Rotation-angle detection device | Takumi Asano, Takeshi Musha, Hiroshi Nishizawa, Takashi Okamuro | 2016-01-12 |
| 9201298 | Imprint method, imprint apparatus, and article manufacturing method | Kazuki Nakagawa, Yosuke Murakami, Takahiro Matsumoto | 2015-12-01 |
| 9164395 | Exposure apparatus, and method of manufacturing a device | Keita Sakai, Tatsuya Hayashi | 2015-10-20 |
| 9157770 | Encoder | Yoichi Omura, Kosuke Shamoto, Takashi Okamuro | 2015-10-13 |
| 9132458 | Processing machine system and method of positioning processing machines | Tetsuji Okada, Keiji Emoto | 2015-09-15 |
| 9057968 | Positioning apparatus, exposure apparatus and method of manufacturing device | Masahiro Ogura, Yasuyuki Tamura | 2015-06-16 |
| 8853982 | Motor control device | Akira Tanabe, Kazuaki Ando | 2014-10-07 |
| 8678808 | Imprint apparatus and article manufacturing method | Setsuo Yoshida, Yoshihiro Shiode, Tatsuya Hayashi | 2014-03-25 |
| 7907251 | Exposure apparatus and device manufacturing method | — | 2011-03-15 |
| 7738076 | Exposure apparatus and device manufacturing method | Shigeru Terashima | 2010-06-15 |
| 7719660 | Exposure apparatus | — | 2010-05-18 |
| 7705966 | Immersion exposure apparatus | Keita Sakai | 2010-04-27 |
| 7423724 | Exposure apparatus and device manufacturing method | Tatsuya Hayashi, Yoshikazu Miyajima | 2008-09-09 |
| 7394522 | Exposure apparatus and device manufacturing method | Tomofumi Nishikawara, Keita Sakai | 2008-07-01 |
| 7330236 | Exposure apparatus, and device manufacturing method using the same | — | 2008-02-12 |
| 7221432 | Exposure apparatus | — | 2007-05-22 |
| 7123343 | Exposure apparatus and device manufacturing method | Shigeru Terashima | 2006-10-17 |
| 7050152 | Exposure apparatus | Shigeru Terashima | 2006-05-23 |