Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954255 | Exposure apparatus | Shigeru Terashima | 2005-10-11 |
| 6934003 | Exposure apparatus and device manufacturing method | Eiji Sakamoto, Shigeru Terashima | 2005-08-23 |
| 6721032 | Exposure apparatus and control method therefor, and device manufacturing method | Shigeru Terashima | 2004-04-13 |
| 6721031 | Exposure apparatus | Shigeru Terashima | 2004-04-13 |
| 6424405 | Exposure apparatus and device manufacturing method | Hiroshi Kurosawa, Kunitaka Ozawa, Keiji Yoshimura | 2002-07-23 |
| 6204911 | Exposure apparatus and device manufacturing method | Hiroshi Kurosawa, Kunitaka Ozawa, Keiji Yoshimura | 2001-03-20 |
| 5914773 | Exposure apparatus and method using pulsed light and changing means to control both the light intensity and light emission timing | Hiroshi Kurosawa, Kunitaka Ozawa, Keiji Yoshimura | 1999-06-22 |
| 5898477 | Exposure apparatus and method of manufacturing a device using the same | Keiji Yoshimura, Kunitaka Ozawa, Hiroshi Kurosawa | 1999-04-27 |
| 5883701 | Scanning projection exposure method and apparatus | Kunitaka Ozawa, Hiroshi Kurosawa, Keiji Yoshimura | 1999-03-16 |
| 5847974 | Measuring method and apparatus for measuring system having measurement error changeable with time | Tetsuzo Mori, Koichi Sentoku, Takahiro Matsumoto | 1998-12-08 |
| 5757838 | Output control method for excimer laser | Kunitaka Ozawa, Hiroshi Kurosawa, Keiji Yoshimura | 1998-05-26 |
| 5498878 | Method and apparatus for detecting positional deviation by using diffraction gratings with a compensation delay determining unit | Tetsuzo Mori | 1996-03-12 |