Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823562 | Imprint apparatus, imprint method, and method of manufacturing article | Kazuki Nakagawa | 2017-11-21 |
| 9341468 | Measuring apparatus | Takahiro Yamamoto | 2016-05-17 |
| 7630056 | Exposure apparatus and device manufacturing method | — | 2009-12-08 |
| 7394522 | Exposure apparatus and device manufacturing method | Noriyasu Hasegawa, Keita Sakai | 2008-07-01 |