Issued Patents All Time
Showing 76–100 of 191 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447612 | Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object | Koichiro Moriyama, Yuzo Koda, Tadashi Hori | 2002-09-10 |
| 6436797 | Apparatus and method for forming a deposited film on a substrate | Yasushi Fujioka, Shotaro Okabe, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-08-20 |
| 6413794 | Method of forming photovoltaic element | Hitomi Sano, Hideo Tamura | 2002-07-02 |
| 6397775 | Deposited film forming system and process | Hitomi Sano, Atsushi Koike, Hiroshi Sugai | 2002-06-04 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Shotaro Okabe, Yasushi Fujioka, Akira Sakai, Tadashi Sawayama, Yuzo Kohda +2 more | 2002-04-09 |
| 6367502 | Flow control device | Etsumi Nagaya | 2002-04-09 |
| 6367920 | Ink cartridge for ink-jet recording apparatus, and ink-jet recording apparatus | Yuichi Seki, Masanori Takemura, Akihiko Kitazawa | 2002-04-09 |
| 6350489 | Deposited-film forming process and deposited-film forming apparatus | Koichiro Moriyama, Hiroshi Echizen, Hirokazu Ohtoshi, Takehito Yoshino, Atsushi Yasuno +2 more | 2002-02-26 |
| 6338872 | Film forming method | Takehito Yoshino, Hiroshi Echizen, Hirokazu Otoshi, Atsushi Yasuno, Kohei Yoshida +2 more | 2002-01-15 |
| 6312411 | Fluid supplying apparatus | — | 2001-11-06 |
| 6313430 | Plasma processing apparatus and plasma processing method | Yasushi Fujioka, Shotaro Okabe, Akira Sakai, Tadashi Sawayama, Yuzo Kohda | 2001-11-06 |
| 6306267 | Method of producing a photovoltaic device using a sputtering method | Hideo Tamura, Yasushi Fujioka, Akira Sakai | 2001-10-23 |
| 6287943 | Deposition of semiconductor layer by plasma process | Yasushi Fujioka, Shotaro Okabe, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2001-09-11 |
| 6273955 | Film forming apparatus | Takehito Yoshino, Hiroshi Echizen, Hirokazu Otoshi, Atsushi Yasuno, Kohei Yoshida +2 more | 2001-08-14 |
| 6271055 | Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layers | Takahiro Yajima, Yasushi Fujioka, Shotaro Okabe, Hirokazu Ohtoshi, Akira Sakai +2 more | 2001-08-07 |
| 6261862 | Process for producing photovoltaic element | Tadashi Hori, Hirokazu Ohtoshi, Naoto Okada, Koichiro Moriyama, Hiroshi Shimoda +1 more | 2001-07-17 |
| 6223684 | Film deposition apparatus | Yasushi Fujioka, Yasuyoshi Takai | 2001-05-01 |
| 6162988 | Photovoltaic element | Shotaro Okabe, Yasushi Fujioka, Akira Sakai, Tadashi Sawayama, Yuzo Kohda +2 more | 2000-12-19 |
| 6159763 | Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element | Akira Sakai, Yasushi Fujioka, Shotaro Okabe, Yuzo Kohda, Tadashi Hori +1 more | 2000-12-12 |
| 6153823 | Photoelectric conversion element having a surface member or a protection member and building material using the same | Atsushi Shiozaki, Keishi Saito, Hirokazu Ohtoshi, Naoto Okada | 2000-11-28 |
| 6153013 | Deposited-film-forming apparatus | Akira Sakai, Shotaro Okabe, Yuzo Kohda, Tadashi Hori, Tomonori Nishimoto +1 more | 2000-11-28 |
| 6113732 | Deposited film forming apparatus | Kohei Yoshida, Hiroshi Echizen, Hirokazu Ohtoshi, Takehito Yoshino, Masatoshi Tanaka | 2000-09-05 |
| 6096389 | Method and apparatus for forming a deposited film using a microwave CVD process | — | 2000-08-01 |
| 6093290 | Method of generating a reciprocating plurality of magnetic fluxes on a target | Hideo Tamura, Yasushi Fujioka, Akira Sakai | 2000-07-25 |
| 6031198 | Plasma processing method and apparatus | Koichiro Moriyama, Yukito Aota, Hirokazu Otoshi | 2000-02-29 |