Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7534628 | Method for forming semiconductor device and method for forming photovoltaic device | Yasuyoshi Takai, Tadashi Sawayama | 2009-05-19 |
| 7211708 | Exhaust processing method, plasma processing method and plasma processing apparatus | Takeshi Shishido, Shotaro Okabe, Masahiro Kanai, Yuzo Koda, Yasuyoshi Takai +3 more | 2007-05-01 |
| 7074641 | Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element | Takaharu Kondo, Shotaro Okabe, Takahiro Yajima, Takeshi Shishido | 2006-07-11 |
| 6858087 | Vacuum-processing method using a movable cooling plate during processing | Tadashi Hori, Masahiro Kanai, Hiroshi Shimoda, Hiroyuki Ozaki | 2005-02-22 |
| 6833155 | Apparatus and method for processing a substrate | Hiroshi Shimoda, Masahiro Kanai, Hirokazu Ohtoshi, Tadashi Hori | 2004-12-21 |
| 6794275 | Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis | Takaharu Kondo, Shotaro Okabe, Masafumi Sano, Akira Sakai, Yuzo Koda +2 more | 2004-09-21 |
| 6667240 | Method and apparatus for forming deposited film | Hiroyuki Ozaki, Masahiro Kanai, Naoto Okada, Hiroshi Shimoda | 2003-12-23 |
| 6602347 | Apparatus and method for processing a substrate | Hiroshi Shimoda, Masahiro Kanai, Hirokazu Ohtoshi, Tadashi Hori | 2003-08-05 |
| 6576061 | Apparatus and method for processing a substrate | Masahiro Kanai, Hirokazu Ohtoshi, Tadashi Hori, Naoto Okada, Hiroshi Shimoda +1 more | 2003-06-10 |
| 6547922 | Vacuum-processing apparatus using a movable cooling plate during processing | Tadashi Hori, Masahiro Kanai, Hiroshi Shimoda, Hiroyuki Ozaki | 2003-04-15 |
| 6447612 | Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object | Masahiro Kanai, Yuzo Koda, Tadashi Hori | 2002-09-10 |
| 6350489 | Deposited-film forming process and deposited-film forming apparatus | Hiroshi Echizen, Masahiro Kanai, Hirokazu Ohtoshi, Takehito Yoshino, Atsushi Yasuno +2 more | 2002-02-26 |
| 6338872 | Film forming method | Takehito Yoshino, Hiroshi Echizen, Masahiro Kanai, Hirokazu Otoshi, Atsushi Yasuno +2 more | 2002-01-15 |
| 6273955 | Film forming apparatus | Takehito Yoshino, Hiroshi Echizen, Masahiro Kanai, Hirokazu Otoshi, Atsushi Yasuno +2 more | 2001-08-14 |
| 6261862 | Process for producing photovoltaic element | Tadashi Hori, Masahiro Kanai, Hirokazu Ohtoshi, Naoto Okada, Hiroshi Shimoda +1 more | 2001-07-17 |
| 6031198 | Plasma processing method and apparatus | Yukito Aota, Masahiro Kanai, Hirokazu Otoshi | 2000-02-29 |