| 7001640 |
Apparatus and method for forming deposited film |
Hiroshi Izawa, Masatoshi Tanaka |
2006-02-21 |
| 6660094 |
Apparatus and method for forming deposited film |
Hiroshi Izawa, Masatoshi Tanaka |
2003-12-09 |
| 6338872 |
Film forming method |
Takehito Yoshino, Hiroshi Echizen, Masahiro Kanai, Atsushi Yasuno, Kohei Yoshida +2 more |
2002-01-15 |
| 6273955 |
Film forming apparatus |
Takehito Yoshino, Hiroshi Echizen, Masahiro Kanai, Atsushi Yasuno, Kohei Yoshida +2 more |
2001-08-14 |
| 6031198 |
Plasma processing method and apparatus |
Koichiro Moriyama, Yukito Aota, Masahiro Kanai |
2000-02-29 |
| 5637358 |
Microwave plasma chemical vapor deposition process using a microwave window and movable, dielectric sheet |
Keishi Saitoh, Ryuji Okamura, Koichi Matsuda |
1997-06-10 |
| 5597623 |
Process for using microwave plasma CVD |
Yasuyoshi Takai, Tetsuya Takei, Ryuji Okamura |
1997-01-28 |
| 5514506 |
Light receiving member having a multi-layered light receiving layer with an enhanced concentration of hydrogen or/and halogen atoms in the vicinity of the interface of adjacent layers |
Yasuyoshi Takai, Tetsuya Takei, Ryuji Okamura, Hiroyuki Katagiri, Satoshi Kojima |
1996-05-07 |
| 5443645 |
Microwave plasma CVD apparatus comprising coaxially aligned multiple gas pipe gas feed structure |
Tetsuya Takei, Yasuyoshi Takai, Ryuji Okamura, Shigeru Shirai, Teruo Misumi |
1995-08-22 |
| 5439715 |
Process and apparatus for microwave plasma chemical vapor deposition |
Ryuji Okamura, Tetsuya Takei |
1995-08-08 |
| 5360484 |
Microwave plasma CVD apparatus provided with a microwave transmissive window made of specific ceramics for the formation of a functional deposited film |
Yasuyoshi Takai, Tetsuya Takei, Ryuji Okamura |
1994-11-01 |
| 5358811 |
Electrophotographic method using an amorphous silicon light receiving member with a latent image support layer and a developed image support layer and insulating toner having a volume average particle size of 4.5 to 9.0 micron |
Koji Yamazaki, Toshimitsu Kariya, Tatsuyuki Aoike, Toshiyuki Ehara, Takehito Yoshino |
1994-10-25 |
| 5087542 |
Electrophotographic image-forming method wherein an amorphous silicon light receiving member with a latent image support layer and a developed image support layer and fine particle insulating toner are used |
Koji Yamazaki, Toshimitsu Kariya, Tatsuyuki Aoike, Toshiyuki Ehara, Takehito Yoshino |
1992-02-11 |
| 5030476 |
Process and apparatus for the formation of a functional deposited film on a cylindrical substrate by means of microwave plasma chemical vapor deposition |
Ryuji Okamura, Tetsuya Takei |
1991-07-09 |
| 5016565 |
Microwave plasma chemical vapor deposition apparatus for forming functional deposited film with means for stabilizing plasma discharge |
Keishi Saitoh, Ryuji Okamura, Koichi Matsuda |
1991-05-21 |
