Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7211708 | Exhaust processing method, plasma processing method and plasma processing apparatus | Takeshi Shishido, Shotaro Okabe, Masahiro Kanai, Yuzo Koda, Yasuyoshi Takai +3 more | 2007-05-01 |
| 6877458 | Apparatus for forming deposited film | Hiroyuki Ozaki, Shotaro Okabe, Masahiro Kanai, Yuzo Koda | 2005-04-12 |
| 6858087 | Vacuum-processing method using a movable cooling plate during processing | Masahiro Kanai, Koichiro Moriyama, Hiroshi Shimoda, Hiroyuki Ozaki | 2005-02-22 |
| 6833155 | Apparatus and method for processing a substrate | Hiroshi Shimoda, Masahiro Kanai, Hirokazu Ohtoshi, Koichiro Moriyama | 2004-12-21 |
| 6653165 | Methods of forming semiconductor element, and semiconductor elements | Takaharu Kondo, Masafumi Sano, Akira Sakai, Koichi Matsuda, Yuzo Koda | 2003-11-25 |
| 6602347 | Apparatus and method for processing a substrate | Hiroshi Shimoda, Masahiro Kanai, Hirokazu Ohtoshi, Koichiro Moriyama | 2003-08-05 |
| 6576061 | Apparatus and method for processing a substrate | Koichiro Moriyama, Masahiro Kanai, Hirokazu Ohtoshi, Naoto Okada, Hiroshi Shimoda +1 more | 2003-06-10 |
| 6547922 | Vacuum-processing apparatus using a movable cooling plate during processing | Masahiro Kanai, Koichiro Moriyama, Hiroshi Shimoda, Hiroyuki Ozaki | 2003-04-15 |
| 6530341 | Deposition apparatus for manufacturing thin film | Yuzo Kohda, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tomonori Nishimoto +1 more | 2003-03-11 |
| 6482668 | Process for producing photovoltaic device | Naoto Okada, Masahiro Kanai, Hirokazu Ohtoshi | 2002-11-19 |
| 6447612 | Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object | Koichiro Moriyama, Masahiro Kanai, Yuzo Koda | 2002-09-10 |
| 6399411 | Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Shotaro Okabe, Akira Sakai, Yuzo Kohda, Takahiro Yajima | 2002-06-04 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Shotaro Okabe, Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +2 more | 2002-04-09 |
| 6261862 | Process for producing photovoltaic element | Masahiro Kanai, Hirokazu Ohtoshi, Naoto Okada, Koichiro Moriyama, Hiroshi Shimoda +1 more | 2001-07-17 |
| 6162988 | Photovoltaic element | Shotaro Okabe, Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +2 more | 2000-12-19 |
| 6159300 | Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Shotaro Okabe, Akira Sakai, Yuzo Kohda, Takahiro Yajima | 2000-12-12 |
| 6159763 | Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element | Akira Sakai, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Yuzo Kohda +1 more | 2000-12-12 |
| 6153013 | Deposited-film-forming apparatus | Akira Sakai, Shotaro Okabe, Masahiro Kanai, Yuzo Kohda, Tomonori Nishimoto +1 more | 2000-11-28 |
| 5968274 | Continuous forming method for functional deposited films and deposition apparatus | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Takehito Yoshino, Akira Sakai | 1999-10-19 |
| 5946587 | Continuous forming method for functional deposited films | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Takehito Yoshino, Akira Sakai | 1999-08-31 |
| 5927994 | Method for manufacturing thin film | Yuzo Kohda, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tomonori Nishimoto +1 more | 1999-07-27 |
| 5919310 | Continuously film-forming apparatus provided with improved gas gate means | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Takehito Yoshino, Akira Sakai | 1999-07-06 |
| 5897332 | Method for manufacturing photoelectric conversion element | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Yuzo Kohda, Tomonori Nishimoto +1 more | 1999-04-27 |
| 5769963 | Photovoltaic device | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Yuzo Koda +2 more | 1998-06-23 |
| 5720826 | Photovoltaic element and fabrication process thereof | Ryo Hayashi, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Jinsho Matsuyama +3 more | 1998-02-24 |