Issued Patents All Time
Showing 1–25 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916447 | Semiconductor device and method for manufacturing semiconductor device | Takeo Furuhata, Tomohiro Shinagawa, Keisuke Nakamura | 2021-02-09 |
| 10559659 | Power semiconductor device | Atsufumi INOUE, Seiji Oka, Tsuyoshi Kawakami, Akihiko Furukawa, Hidetada Tokioka +1 more | 2020-02-11 |
| 7750233 | Thin film solar cell and manufacturing method thereof | Tohru Takeda | 2010-07-06 |
| 7722738 | Semiconductor device manufacturing unit and semiconductor device manufacturing method | Katsushi Kishimoto, Yusuke Fukuoka, Hiroyuki Fukuda, Katsuhiko Nomoto | 2010-05-25 |
| 7565880 | Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same | Akira Shimizu, Yuhsuke Fukuoka, Katsushi Kishimoto, Katsuhiko Nomoto | 2009-07-28 |
| 7195673 | Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same | Akira Shimizu, Yuhsuke Fukuoka, Katsushi Kishimoto, Katsuhiko Nomoto | 2007-03-27 |
| 7032536 | Thin film formation apparatus including engagement members for support during thermal expansion | Yusuke Fukuoka, Katsushi Kishimoto, Hiroyuki Fukuda, Katsuhiko Nomoto | 2006-04-25 |
| 6822157 | Thin film solar battery module | — | 2004-11-23 |
| 6525264 | Thin-film solar cell module | Takashi Ouchida, Katsushi Kishimoto | 2003-02-25 |
| 6495392 | Process for producing a semiconductor device | Akira Sakai, Shotaro Okabe, Masahiro Kanai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-12-17 |
| 6472296 | Fabrication of photovoltaic cell by plasma process | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-10-29 |
| 6436797 | Apparatus and method for forming a deposited film on a substrate | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-08-20 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Kohda +2 more | 2002-04-09 |
| 6313430 | Plasma processing apparatus and plasma processing method | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Kohda | 2001-11-06 |
| 6306267 | Method of producing a photovoltaic device using a sputtering method | Hideo Tamura, Masahiro Kanai, Akira Sakai | 2001-10-23 |
| 6287943 | Deposition of semiconductor layer by plasma process | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2001-09-11 |
| 6271055 | Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layers | Takahiro Yajima, Shotaro Okabe, Masahiro Kanai, Hirokazu Ohtoshi, Akira Sakai +2 more | 2001-08-07 |
| 6223684 | Film deposition apparatus | Masahiro Kanai, Yasuyoshi Takai | 2001-05-01 |
| 6162988 | Photovoltaic element | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Kohda +2 more | 2000-12-19 |
| 6159763 | Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element | Akira Sakai, Shotaro Okabe, Masahiro Kanai, Yuzo Kohda, Tadashi Hori +1 more | 2000-12-12 |
| 6093290 | Method of generating a reciprocating plurality of magnetic fluxes on a target | Hideo Tamura, Masahiro Kanai, Akira Sakai | 2000-07-25 |
| 5968274 | Continuous forming method for functional deposited films and deposition apparatus | Shotaro Okabe, Masahiro Kanai, Takehito Yoshino, Akira Sakai, Tadashi Hori | 1999-10-19 |
| 5946587 | Continuous forming method for functional deposited films | Shotaro Okabe, Masahiro Kanai, Takehito Yoshino, Akira Sakai, Tadashi Hori | 1999-08-31 |
| 5919310 | Continuously film-forming apparatus provided with improved gas gate means | Shotaro Okabe, Masahiro Kanai, Takehito Yoshino, Akira Sakai, Tadashi Hori | 1999-07-06 |
| 5769963 | Photovoltaic device | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Yuzo Koda, Tadashi Hori +2 more | 1998-06-23 |