Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7501305 | Method for forming deposited film and photovoltaic element | Yasuyoshi Takai, Hiroshi Shimoda, Koichi Matsuda, Hidetoshi Tsuzuki | 2009-03-10 |
| 7211708 | Exhaust processing method, plasma processing method and plasma processing apparatus | Takeshi Shishido, Masahiro Kanai, Yuzo Koda, Yasuyoshi Takai, Tadashi Hori +3 more | 2007-05-01 |
| 7074641 | Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element | Takaharu Kondo, Koichiro Moriyama, Takahiro Yajima, Takeshi Shishido | 2006-07-11 |
| 6877458 | Apparatus for forming deposited film | Hiroyuki Ozaki, Masahiro Kanai, Yuzo Koda, Tadashi Hori | 2005-04-12 |
| 6858308 | Semiconductor element, and method of forming silicon-based film | Takaharu Kondo, Masafumi Sano, Akira Sakai, Ryo Hayashi, Shuichiro Sugiyama | 2005-02-22 |
| 6794275 | Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis | Takaharu Kondo, Masafumi Sano, Akira Sakai, Yuzo Koda, Ryo Hayashi +2 more | 2004-09-21 |
| 6530341 | Deposition apparatus for manufacturing thin film | Yuzo Kohda, Masahiro Kanai, Akira Sakai, Tadashi Hori, Tomonori Nishimoto +1 more | 2003-03-11 |
| 6495392 | Process for producing a semiconductor device | Akira Sakai, Yasushi Fujioka, Masahiro Kanai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-12-17 |
| 6472296 | Fabrication of photovoltaic cell by plasma process | Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-10-29 |
| 6436797 | Apparatus and method for forming a deposited film on a substrate | Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-08-20 |
| 6399411 | Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Tadashi Hori, Akira Sakai, Yuzo Kohda, Takahiro Yajima | 2002-06-04 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Kohda +2 more | 2002-04-09 |
| 6313430 | Plasma processing apparatus and plasma processing method | Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Kohda | 2001-11-06 |
| 6287943 | Deposition of semiconductor layer by plasma process | Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2001-09-11 |
| 6271055 | Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layers | Takahiro Yajima, Yasushi Fujioka, Masahiro Kanai, Hirokazu Ohtoshi, Akira Sakai +2 more | 2001-08-07 |
| 6162988 | Photovoltaic element | Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama, Yuzo Kohda +2 more | 2000-12-19 |
| 6159300 | Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Tadashi Hori, Akira Sakai, Yuzo Kohda, Takahiro Yajima | 2000-12-12 |
| 6159763 | Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element | Akira Sakai, Yasushi Fujioka, Masahiro Kanai, Yuzo Kohda, Tadashi Hori +1 more | 2000-12-12 |
| 6153013 | Deposited-film-forming apparatus | Akira Sakai, Masahiro Kanai, Yuzo Kohda, Tadashi Hori, Tomonori Nishimoto +1 more | 2000-11-28 |
| 5968274 | Continuous forming method for functional deposited films and deposition apparatus | Yasushi Fujioka, Masahiro Kanai, Takehito Yoshino, Akira Sakai, Tadashi Hori | 1999-10-19 |
| 5946587 | Continuous forming method for functional deposited films | Yasushi Fujioka, Masahiro Kanai, Takehito Yoshino, Akira Sakai, Tadashi Hori | 1999-08-31 |
| 5927994 | Method for manufacturing thin film | Yuzo Kohda, Masahiro Kanai, Akira Sakai, Tadashi Hori, Tomonori Nishimoto +1 more | 1999-07-27 |
| 5919310 | Continuously film-forming apparatus provided with improved gas gate means | Yasushi Fujioka, Masahiro Kanai, Takehito Yoshino, Akira Sakai, Tadashi Hori | 1999-07-06 |
| 5897332 | Method for manufacturing photoelectric conversion element | Tadashi Hori, Masahiro Kanai, Akira Sakai, Yuzo Kohda, Tomonori Nishimoto +1 more | 1999-04-27 |
| 5769963 | Photovoltaic device | Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Yuzo Koda, Tadashi Hori +2 more | 1998-06-23 |