Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6530341 | Deposition apparatus for manufacturing thin film | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Hori, Tomonori Nishimoto +1 more | 2003-03-11 |
| 6399411 | Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Tadashi Hori, Shotaro Okabe, Akira Sakai, Takahiro Yajima | 2002-06-04 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Shotaro Okabe, Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +2 more | 2002-04-09 |
| 6313430 | Plasma processing apparatus and plasma processing method | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama | 2001-11-06 |
| 6271055 | Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layers | Takahiro Yajima, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Hirokazu Ohtoshi +2 more | 2001-08-07 |
| 6162988 | Photovoltaic element | Shotaro Okabe, Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +2 more | 2000-12-19 |
| 6159763 | Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element | Akira Sakai, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Tadashi Hori +1 more | 2000-12-12 |
| 6159300 | Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Tadashi Hori, Shotaro Okabe, Akira Sakai, Takahiro Yajima | 2000-12-12 |
| 6153013 | Deposited-film-forming apparatus | Akira Sakai, Shotaro Okabe, Masahiro Kanai, Tadashi Hori, Tomonori Nishimoto +1 more | 2000-11-28 |
| 5927994 | Method for manufacturing thin film | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Hori, Tomonori Nishimoto +1 more | 1999-07-27 |
| 5897332 | Method for manufacturing photoelectric conversion element | Tadashi Hori, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tomonori Nishimoto +1 more | 1999-04-27 |
| 5382531 | Method for continuously manufacturing a semiconductor device | Yasushi Fujioka, Takashi Kurokawa, Masahiro Kanai, Masafumi Sano, Takehito Yoshino | 1995-01-17 |
| 5284525 | Solar cell | Keishi Saito, Tatsuyuki Aoike, Yasushi Fujioka, Mitsuyuki Niwa, Toshimitsu Kariya | 1994-02-08 |
| 5266116 | Glow discharge apparatus for continuously manufacturing semiconductor device comprising gas gates with slotted rollers | Yasushi Fujioka, Takashi Kurokawa, Masahiro Kanai, Masafumi Sano, Takehito Yoshino | 1993-11-30 |