Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7211708 | Exhaust processing method, plasma processing method and plasma processing apparatus | Takeshi Shishido, Shotaro Okabe, Masahiro Kanai, Yasuyoshi Takai, Tadashi Hori +3 more | 2007-05-01 |
| 6877458 | Apparatus for forming deposited film | Hiroyuki Ozaki, Shotaro Okabe, Masahiro Kanai, Tadashi Hori | 2005-04-12 |
| 6846521 | Apparatus and method for forming deposited film | Takeshi Shishido, Masahiro Kanai, Takahiro Yajima | 2005-01-25 |
| 6794275 | Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis | Takaharu Kondo, Shotaro Okabe, Masafumi Sano, Akira Sakai, Ryo Hayashi +2 more | 2004-09-21 |
| 6653165 | Methods of forming semiconductor element, and semiconductor elements | Takaharu Kondo, Masafumi Sano, Akira Sakai, Koichi Matsuda, Tadashi Hori | 2003-11-25 |
| 6632284 | Apparatus and method for forming deposited film | Takeshi Shishido, Masahiro Kanai, Takahiro Yajima | 2003-10-14 |
| 6495392 | Process for producing a semiconductor device | Akira Sakai, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Tadashi Sawayama +1 more | 2002-12-17 |
| 6470823 | Apparatus and method for forming a deposited film by a means of plasma CVD | Takahiro Yajima, Masahiro Kanai, Takeshi Shishido | 2002-10-29 |
| 6472296 | Fabrication of photovoltaic cell by plasma process | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +1 more | 2002-10-29 |
| 6447612 | Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object | Koichiro Moriyama, Masahiro Kanai, Tadashi Hori | 2002-09-10 |
| 6436797 | Apparatus and method for forming a deposited film on a substrate | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +1 more | 2002-08-20 |
| 6287943 | Deposition of semiconductor layer by plasma process | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +1 more | 2001-09-11 |
| 5769963 | Photovoltaic device | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Hori +2 more | 1998-06-23 |
| 5720826 | Photovoltaic element and fabrication process thereof | Ryo Hayashi, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Jinsho Matsuyama +3 more | 1998-02-24 |
| 5510631 | Non-monocrystalline silicon carbide semiconductor and semiconductor device employing the same | Keishi Saito, Tatsuyuki Aoike, Toshimitsu Kariya | 1996-04-23 |
| 5439533 | Photovoltaic device, method of producing the same and generating system using the same | Keishi Saito, Jinsho Matsuyama, Toshimitsu Kariya, Koichi Matsuda, Naoto Okada | 1995-08-08 |
| 5418680 | Apparatus for repairing an electrically short-circuited semiconductor device | Keishi Saito, Tatsuyuki Aoike, Mitsuyuki Niwa, Toshimitsu Kariya | 1995-05-23 |
| 5371380 | Si- and/or Ge-containing non-single crystalline semiconductor film with an average radius of 3.5 A or less as for microvoids contained therein and a microvoid density 1.times.10.sup.(19) (cm.sup.-3) or less | Keishi Saito, Tatsuyuki Aoike, Mitsuyuki Niwa, Toshimitsu Kariya | 1994-12-06 |
| 5362684 | Non-monocrystalline silicon carbide semiconductor, process of production thereof, and semiconductor device employing the same | Keishi Saito, Tatsuyuki Aoike, Toshimitsu Kariya | 1994-11-08 |
| 5281541 | Method for repairing an electrically short-circuited semiconductor device, and process for producing a semiconductor device utilizing said method | Keishi Saito, Tatsuyuki Aoike, Mitsuyuki Niwa, Toshimitsu Kariya | 1994-01-25 |