Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185559 | Organic light-emitting display apparatus having pixel electrodes with varying flatness | Hyunsuk Park | 2024-12-31 |
| 11264571 | Bake system and method of fabricating display device using the same | — | 2022-03-01 |
| 11211576 | Organic light emitting device and method of manufacturing the same | Yoon-Ho Kang, Dong Hoon Kwak | 2021-12-28 |
| 10573841 | Organic light emitting device and method of manufacturing the same | Yoon-Ho Kang, Dong Hoon Kwak | 2020-02-25 |
| 10052657 | Vacuum drying apparatus and method of manufacturing film using the same | — | 2018-08-21 |
| 10032922 | Thin-film transistor with crystallized active layer, method of manufacturing the same, and organic light-emitting display device including the same | — | 2018-07-24 |
| 10032927 | Oxide sputtering target, and thin film transistor using the same | Yoshinori Tanaka, Yeon Keon Moon, Sang Woo Sohn, Sang Won Shin, Takayuki Fukasawa | 2018-07-24 |
| 9799712 | Method of manufacturing light-emitting display device with reduced pressure drying | Atsushi Kitabayashi, Jae Kwon Hwang | 2017-10-24 |
| 9722089 | Thin film transistor array panel and manufacturing method thereof | Yeon Keon Moon, Sang Woo Sohn, Takayuki Fukasawa, Sang Won Shin | 2017-08-01 |
| 9644270 | Oxide semiconductor depositing apparatus and method of manufacturing oxide semiconductor using the same | Yeon Keon Moon, Sang Woo Sohn, Takayuki Fukasawa, Sang Won Shin | 2017-05-09 |
| 9543444 | Oxide sputtering target, and thin film transistor using the same | Yoshinori Tanaka, Yeon Keon Moon, Sang Woo Sohn, Sang Won Shin, Takayuki Fukasawa | 2017-01-10 |
| 9530622 | Sputtering device and gas supply pipe for sputtering device | Takayuki Fukasawa, Yeon Keon Moon, Sang Woo Sohn, Sang Won Shin | 2016-12-27 |
| 9484200 | Oxide sputtering target, thin film transistor using the same, and method for manufacturing thin film transistor | Takayuki Fukasawa | 2016-11-01 |
| 9246377 | Apparatus for transferring substrate | Takayuki Fukasawa, Yeon Keon Moon, Sang Woo Sohn, Sang Won Shin | 2016-01-26 |
| 8395250 | Plasma processing apparatus with an exhaust port above the substrate | Yusuke Fukuoka | 2013-03-12 |
| 8389389 | Semiconductor layer manufacturing method, semiconductor layer manufacturing apparatus, and semiconductor device manufactured using such method and apparatus | Yusuke Fukuoka | 2013-03-05 |
| 8137046 | Substrate transfer apparatus and substrate transfer method | Yusuke Fukuoka, Noriyoshi Kohama, Yusuke Ozaki | 2012-03-20 |
| 8092640 | Plasma processing apparatus and semiconductor device manufactured by the same apparatus | Yusuke Fukuoka | 2012-01-10 |
| 8093142 | Plasma processing apparatus and plasma processing method | Yusuke Fukuoka | 2012-01-10 |
| 7979166 | Generation facility management system | Kazuo Yamada, Nobuhiro Fuke, Takashi Fukushima | 2011-07-12 |
| 7927455 | Plasma processing apparatus | Yuhsuke Hukuoka | 2011-04-19 |
| 7918939 | Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same | Yusuke Fukuoka | 2011-04-05 |
| 7722738 | Semiconductor device manufacturing unit and semiconductor device manufacturing method | Yusuke Fukuoka, Yasushi Fujioka, Hiroyuki Fukuda, Katsuhiko Nomoto | 2010-05-25 |
| 7565880 | Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same | Akira Shimizu, Yuhsuke Fukuoka, Yasushi Fujioka, Katsuhiko Nomoto | 2009-07-28 |
| 7540257 | Plasma processing apparatus and semiconductor device manufactured by the same apparatus | Yusuke Fukuoka | 2009-06-02 |