Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7195673 | Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same | Akira Shimizu, Yuhsuke Fukuoka, Yasushi Fujioka, Katsuhiko Nomoto | 2007-03-27 |
| 7032536 | Thin film formation apparatus including engagement members for support during thermal expansion | Yusuke Fukuoka, Yasushi Fujioka, Hiroyuki Fukuda, Katsuhiko Nomoto | 2006-04-25 |
| 6979589 | Silicon-based thin-film photoelectric conversion device and method of manufacturing thereof | Yusuke Fukuoka, Katsuhiko Nomoto | 2005-12-27 |
| 6525264 | Thin-film solar cell module | Takashi Ouchida, Yasushi Fujioka | 2003-02-25 |
| 6383898 | Method for manufacturing photoelectric conversion device | — | 2002-05-07 |
| 6242686 | Photovoltaic device and process for producing the same | Takanori Nakano, Hitoshi Sannomiya, Katsuhiko Nomoto | 2001-06-05 |