Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7209507 | Method and apparatus for controlling the output of a gas discharge MOPA laser system | Paolo Zambon | 2007-04-24 |
| 7079564 | Control system for a two chamber gas discharge laser | John P. Fallon, Robert N. Jacques, Jacob Lipcon, William N. Partlo, Alexander I. Ershov +4 more | 2006-07-18 |
| 7039086 | Control system for a two chamber gas discharge laser | John P. Fallon, Robert N. Jacques, Jacob Lipcon, Richard L. Sandstrom, William N. Partlo +5 more | 2006-05-02 |
| 6963595 | Automatic gas control system for a gas discharge laser | Richard Morton, Vladimir V. Fleurov, Fedor Trintchouk, Toshihiko Ishihara, Alexander I. Ershov +1 more | 2005-11-08 |
| 6853653 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, Robert N. Jacques, Armen Kroyan, Ivan Lalovic +2 more | 2005-02-08 |
| 6690704 | Control system for a two chamber gas discharge laser | John P. Fallon, Richard L. Sandstrom, William N. Partlo, Alexander I. Ershov, Toshihiko Ishihara +4 more | 2004-02-10 |
| 6650666 | Laser wavelength control unit with piezoelectric driver | Ronald Spangler, Robert N. Jacques, Frederick Palenschat, Igor V. Fomenkov, John M. Algots +2 more | 2003-11-18 |
| 6563128 | Base stabilization system | Leonard Lublin, David J. Warkentin, Baruch Pletner | 2003-05-13 |
| 5244831 | Method of doping a polysilicon layer on a semiconductor wafer | Gregory Hindman, Jack Berg | 1993-09-14 |