Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109479 | Method of making a semiconductor device with a buried insulating layer formed by annealing a superlattice | Robert J. Mears, Robert John Stephenson, Nyles Wynn Cody, Marek Hytha | 2018-10-23 |
| 9490325 | Structures and devices including a tensile-stressed silicon arsenic layer and methods of forming same | — | 2016-11-08 |
| 9324811 | Structures and devices including a tensile-stressed silicon arsenic layer and methods of forming same | — | 2016-04-26 |
| 9312131 | Selective epitaxial formation of semiconductive films | Matthias Bauer | 2016-04-12 |
| 9099423 | Doped semiconductor films and processing | John Tolle, Matthew G. Goodman, Sandeep Mehta | 2015-08-04 |
| 8278176 | Selective epitaxial formation of semiconductor films | Matthias Bauer | 2012-10-02 |
| 8088223 | System for control of gas injectors | Michael A. Todd, Paul Jacobson | 2012-01-03 |
| 7964513 | Method to form ultra high quality silicon-containing compound layers | Michael A. Todd, Christiaan J. Werkhoven, Christophe Pomarede | 2011-06-21 |
| 7901968 | Heteroepitaxial deposition over an oxidized surface | Paul Brabant | 2011-03-08 |
| 7816236 | Selective deposition of silicon-containing films | Matthias Bauer, Chantal Arena, Ronald Thomas Bertram, JR., Pierre Tomasini, Nyles Wynn Cody +3 more | 2010-10-19 |
| 7651953 | Method to form ultra high quality silicon-containing compound layers | Michael A. Todd, Christiaan J. Werkhoven, Christophe Pomarede | 2010-01-26 |
| 7648690 | Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition | Matthias Bauer, Pierre Tomasini, Nyles Wynn Cody | 2010-01-19 |
| 7438760 | Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition | Matthias Bauer, Pierre Tomasini, Nyles Wynn Cody | 2008-10-21 |
| 7297641 | Method to form ultra high quality silicon-containing compound layers | Michael A. Todd, Christiaan J. Werkhoven, Christophe Pomarede | 2007-11-20 |
| 7294582 | Low temperature silicon compound deposition | Ruben Haverkort, Yuet Wan, Marinus De Blank, Cornelius A. van der Jeugd, Jacobus Johannes Beulens +3 more | 2007-11-13 |
| 7029995 | Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy | Michael A. Todd, Paul Brabant, Jianqing Wen | 2006-04-18 |
| 7005160 | Methods for depositing polycrystalline films with engineered grain structures | Michael A. Todd | 2006-02-28 |