Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289304 | Apparatus using multiple beams of charged particles | Xuerang Hu, Weiming Ren, Xuedong Liu | 2022-03-29 |
| 11282675 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuedong Liu, Xuerang Hu | 2022-03-22 |
| 11222766 | Multi-cell detector for charged particles | Joe Wang, Yongxin Wang, Xuerang Hu | 2022-01-11 |
| 11062874 | Apparatus using multiple charged particle beams | Weiming Ren, Xuedong Liu, Xuerang Hu | 2021-07-13 |
| 10892138 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuedong Liu, Xuerang Hu | 2021-01-12 |
| 10879032 | Multi-beam inspection apparatus | Xuerang Hu, Xuedong Liu, Weiming Ren | 2020-12-29 |
| 9400176 | Dynamic focus adjustment with optical height detection apparatus in electron beam system | Joe Wang, Van-Duc Nguyen, Yi Wang, Jack Jau | 2016-07-26 |
| 8752030 | Process abstraction and tracking, systems and methods | Hongqi Jia, Chunsheng Chen, Gang Fu | 2014-06-10 |
| 8314401 | Electron gun with magnetic immersion double condenser lenses | Xu Zhang | 2012-11-20 |
| 8229114 | Identity-based key generating methods and devices | Xianghao Nan | 2012-07-24 |
| 8218284 | Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam | Yi Wang, Juying Dou | 2012-07-10 |
| 8022609 | Thermal field emission cathode | Juying Dou | 2011-09-20 |
| 7928383 | Charged particle system including segmented detection elements | Joe Wang, Xu Zhang | 2011-04-19 |
| 7893406 | Electron gun with magnetic immersion double condenser lenses | Xu Zhang | 2011-02-22 |
| 7872236 | Charged particle detection devices | Xu Zhang, Joe Wang | 2011-01-18 |
| 7759653 | Electron beam apparatus | Xuedong Liu, Xu Zhang, Weiming Ren, Juying Dou | 2010-07-20 |
| 7705298 | System and method to determine focus parameters during an electron beam inspection | Xuedong Liu, Zhonghua Dong, Wei FANG | 2010-04-27 |
| 7705301 | Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector | Chi-Hua Tseng, Xuedong Liu | 2010-04-27 |
| 7474001 | Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing | Yan Zhao, Chang-Chun Yeh, Jack Jau | 2009-01-06 |
| 7335879 | System and method for sample charge control | — | 2008-02-26 |
| 7105436 | Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing | Yan Zhao, Chang-Chun Yeh, Jack Jau | 2006-09-12 |
| 6960766 | Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method | — | 2005-11-01 |
| 6710342 | Method and apparatus for scanning semiconductor wafers using a scanning electron microscope | Jack Jau | 2004-03-23 |
| 6605805 | Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method | — | 2003-08-12 |
| 6392231 | Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method | — | 2002-05-21 |