Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8367965 | Electrode design for plasma processing chamber | Benson Chao | 2013-02-05 |
| 7705301 | Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector | Zhong-Wei Chen, Xuedong Liu | 2010-04-27 |