Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5717204 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Alan D. Brodie, Jack Jau | 1998-02-10 |
| 5665968 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Alan D. Brodie, Jack Jau, Brian J. Grenon | 1997-09-09 |
| 5578821 | Electron beam inspection system and method | Dan Meisberger, Alan D. Brodie, Anil Desai, Dennis G. Emge, Richard R. Simmons +7 more | 1996-11-26 |