Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854762 | MEMS sample holder, packaged product thereof, and apparatus of charged-particle beam such as electron microscope using the same | Xiaoming Chen, Daniel Tang, Liang-Fu Fan, Zhongwei Chen | 2023-12-26 |
| 11854763 | Backscattered electron detector, apparatus of charged-particle beam such as electron microscope comprising the same, and method thereof | Xiaoming Chen, Daniel Tang, Liang-Fu Fan, Zhongwei Chen | 2023-12-26 |
| 11664186 | Apparatus of electron beam comprising pinnacle limiting plate and method of reducing electron-electron interaction | Zhongwei Chen, Xiaoming Chen, Daniel Tang, Liang-Fu Fan | 2023-05-30 |
| 9490141 | Method for planarizing semiconductor device | Jiann-Shiun Chen, Tzu-Yi Chuang | 2016-11-08 |
| 9330987 | Hot spot identification, inspection, and review | Steve Lin, Eric Ma, Zhonghua Dong, Jon Yee Chiang, Yan Zhao +2 more | 2016-05-03 |
| 7705298 | System and method to determine focus parameters during an electron beam inspection | Xuedong Liu, Zhonghua Dong, Zhong-Wei Chen | 2010-04-27 |