Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442395 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2016-09-13 |
| 9423699 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Yogesh Pramod Karade | 2016-08-23 |
| 9323164 | Coatings | — | 2016-04-26 |
| 9316927 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg, Peter Van Delft | 2016-04-19 |
| 9256139 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more | 2016-02-09 |
| 8993220 | Immersion lithographic apparatus and a device manufacturing method | Olga Vladimirovna Elisseeva | 2015-03-31 |
| 8889042 | Coatings | — | 2014-11-18 |
| 8891053 | Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing method | Nicolaas Ten Kate, Sandra Van Der Graaf, Henricus Jozef Castelijns | 2014-11-18 |
| 8823919 | Lithographic apparatus, removable member and device manufacturing method | Roelof Frederik De Graaf, Marcus Adrianus Van De Kerkhof, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Gerardus Martinus Antonius De Rooij +4 more | 2014-09-02 |
| 8659741 | Lithographic apparatus, removable member and device manufacturing method | Roelof Frederik De Graaf, Marcus Adrianus Van De Kerkhof, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Gerardus Martinus Antonius De Rooij +4 more | 2014-02-25 |
| 8599356 | Shutter member, a lithographic apparatus and device manufacturing method | Takeshi Kaneko, Erik Henricus Egidius Catharina Eummelen, Matthias Kruizinga | 2013-12-03 |
| 8512817 | Lithographic apparatus and a method of forming a lyophobic coating on a surface | — | 2013-08-20 |
| 8395772 | Sensor, a table and lithographic apparatus | Henricus Wilhelmus Maria Van Buel, Jeroen Thomas Broekhuijse, Vitaliy Prosyentsov, Sandra Van Der Graaf | 2013-03-12 |