| 6454865 |
Low mass wafer support system |
Matthew G. Goodman, Ivo Raaijmakers, Franciscus Bernardus Maria Van Bilsen, Michael J. Meyer, Eric Barrett |
2002-09-24 |
| 6454866 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more |
2002-09-24 |
| 6343183 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more |
2002-01-29 |
| 6325858 |
Long life high temperature process chamber |
John F. Wengert, Ivo Raaijmakers, Mike Halpin, Michael J. Meyer, Frank B. M. Van Bilsen +4 more |
2001-12-04 |
| 6293749 |
Substrate transfer system for semiconductor processing equipment |
Ivo Raaijmakers, Michael Halpin, James A. Alexander, Ken O'Neill, Dennis L. Goodwin |
2001-09-25 |
| 6203622 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +1 more |
2001-03-20 |
| 6113702 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more |
2000-09-05 |
| 6093252 |
Process chamber with inner support |
John F. Wengert, Michael Halpin, Derrick W. Foster, Cornelius A. van der Jeugd, Robert Vyne +1 more |
2000-07-25 |
| 6068441 |
Substrate transfer system for semiconductor processing equipment |
Ivo Raaijmakers, Mike Halpin, Jim Alexander, Ken O'Neill, Dennis L. Goodwin |
2000-05-30 |
| 6053982 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +1 more |
2000-04-25 |