Issued Patents All Time
Showing 226–234 of 234 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, David Cheung, Ellie Yieh, Li-Qun Xia, Wai-Fan Yau +4 more | 2002-07-02 |
| 6352591 | Methods and apparatus for shallow trench isolation | Ellie Yieh, Li-Qun Xia | 2002-03-05 |
| 6347636 | Methods and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Visweswaren Sivaramakrishnan, Ellie Yieh, Gary Fong | 2002-02-19 |
| 6348099 | Methods and apparatus for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions | Li-Qun Xia, Ellie Yieh | 2002-02-19 |
| 6114216 | Methods for shallow trench isolation | Ellie Yieh, Li-Qun Xia | 2000-09-05 |
| 6090206 | Throttle valve providing enhanced cleaning | Won Bae Bang, Matthew Losey, Francimar Campana, Sundar Pichai | 2000-07-18 |
| 5963840 | Methods for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions | Li-Qun Xia, Ellie Yieh | 1999-10-05 |
| 5935340 | Method and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Visweswaren Sivaramakrishnan, Ellie Yieh, Gary Fong | 1999-08-10 |
| 5812403 | Methods and apparatus for cleaning surfaces in a substrate processing system | Gary Fong, Li-Qun Xia, Ellie Yieh | 1998-09-22 |