Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047457 | EPI pre-heat ring | Kartik Shah | 2018-08-14 |
| 9905454 | Substrate transfer mechanisms | Masato Ishii, Mehmet Tugrul Samir, Jeffrey Tobin | 2018-02-27 |
| 9842748 | Flow controlled liner having spatially distributed gas passages | Mehmet Tugrul Samir | 2017-12-12 |
| 9814099 | Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same | Joseph M. Ranish, Paul Brillhart, Mehmet Tugrul Samir | 2017-11-07 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| 9553002 | Flow controlled liner having spatially distributed gas passages | Mehmet Tugrul Samir | 2017-01-24 |
| 9532401 | Susceptor support shaft with uniformity tuning lenses for EPI process | Zhepeng CONG, Balasubramanian Ramachandran, Masato Ishii, Xuebin Li, Mehmet Tugrul Samir +1 more | 2016-12-27 |
| 9123765 | Susceptor support shaft for improved wafer temperature uniformity and process repeatability | Mehmet Tugrul Samir | 2015-09-01 |
| D717746 | Lower chamber liner | Mehmet Tugrul Samir | 2014-11-18 |
| D716240 | Lower chamber liner | Mehmet Tugrul Samir, Anzhong Chang, Paul Brillhart, Richard O. Collins | 2014-10-28 |
| D716239 | Upper chamber liner | Mehmet Tugrul Samir | 2014-10-28 |
| D711331 | Upper chamber liner | Mehmet Tugrul Samir, Anzhong Chang, Paul Brillhart, Richard O. Collins | 2014-08-19 |