Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9486893 | Conditioning of grooving in polishing pads | Hung Chih Chen, Rajeev Bajaj, Brian J. Brown, Fred C. Redeker | 2016-11-08 |
| 8133096 | Multi-phase polishing pad | Ramin Emami, Sourabh Mishra | 2012-03-13 |
| 7048607 | System and method for chemical mechanical planarization | Li-Wei Wu, Sourabh Mishra, Young Jeen Paik, Satyasrayan Kumaraswamy, Chiu Hung Chan +1 more | 2006-05-23 |
| 6857941 | Multi-phase polishing pad | Ramin Emami, Sourabh Mishra | 2005-02-22 |
| 6468136 | Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notching | David W. Groechel, Li Wu, Chiu Chan | 2002-10-22 |
| 5338398 | Tungsten silicide etch process selective to photoresist and oxide | Chester A. Szwejkowski, Thierry Fried | 1994-08-16 |