Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 5338398 | Tungsten silicide etch process selective to photoresist and oxide | Chester A. Szwejkowski, Robert Lum | 1994-08-16 | $53,307,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 5338398 | Tungsten silicide etch process selective to photoresist and oxide | Chester A. Szwejkowski, Robert Lum | 1994-08-16 | $53,307,000 |