Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338398 | Tungsten silicide etch process selective to photoresist and oxide | Chester A. Szwejkowski, Robert Lum | 1994-08-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338398 | Tungsten silicide etch process selective to photoresist and oxide | Chester A. Szwejkowski, Robert Lum | 1994-08-16 |