Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7137879 | Conductive polishing article for electrochemical mechanical polishing | Liang-Yuh Chen, Yuchun Wang, Yan Wang, Alain Duboust, Daniel Carl +4 more | 2006-11-21 |
| 7125477 | Contacts for electrochemical processing | Paul D. Butterfield, Liang-Yuh Chen, Yongqi Hu, Antoine P. Manens, Stan Tsai | 2006-10-24 |
| 7104869 | Barrier removal at low polish pressure | Stan Tsai, Lizhong Sun, Feng Q. Liu, Liang-Yuh Chen, Ratson Morad | 2006-09-12 |
| 7066800 | Conductive polishing article for electrochemical mechanical polishing | Liang-Yuh Chen, Yuchun Wang, Yan Wang, Alain Duboust, Daniel Carl +4 more | 2006-06-27 |
| 7060606 | Method and apparatus for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Lizhong Sun, Shijian Li, Feng Q. Liu +2 more | 2006-06-13 |
| 6991526 | Control of removal profile in electrochemically assisted CMP | Lizhong Sun, Liang-Yuh Chen, Siew Neo, Feng Q. Liu, Alain Duboust +1 more | 2006-01-31 |
| 6988942 | Conductive polishing article for electrochemical mechanical polishing | Liang-Yuh Chen, Yuchun Wang, Yan Wang, Alain Duboust, Daniel Carl +4 more | 2006-01-24 |
| 6979248 | Conductive polishing article for electrochemical mechanical polishing | Yongqi Hu, Yan Wang, Alain Duboust, Feng Q. Liu, Liang-Yuh Chen +2 more | 2005-12-27 |
| 6962524 | Conductive polishing article for electrochemical mechanical polishing | Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Antoine P. Manens, Stan Tsai +5 more | 2005-11-08 |
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2005-10-18 |
| 6869498 | Chemical mechanical polishing with shear force measurement | Stan Tsai, Liang-Yuh Chen | 2005-03-22 |
| 6821881 | Method for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Lizhong Sun, Shijian Li, Feng Q. Liu +2 more | 2004-11-23 |
| 6710874 | Method and apparatus for detecting individual particles in a flowable sample | — | 2004-03-23 |
| 6573836 | Method and apparatus for detecting the presence of powdered material in envelopes | Norm Gitis, Alex Meyman, Oleg Shulepov | 2003-06-03 |
| 6392745 | Method and apparatus for the fast detection of surface characteristics | Hwa-Chi Wang | 2002-05-21 |
| 5903338 | Condensation nucleus counter using mixing and cooling | Craig Parsons | 1999-05-11 |