Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5516367 | Chemical vapor deposition chamber with a purge guide | Ilya Perlov, Karl A. Littau, Alan F. Morrison, Mei Chang, Ashok Sinha | 1996-05-14 |
| 5476548 | Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring | Cissy Leung, Eric A. Englhardt, Ashok Sinha | 1995-12-19 |
| 5468298 | Bottom purge manifold for CVD tungsten process | Cissy Leung | 1995-11-21 |
| 5421894 | Power loss recovery for wafer heater | Gean Hsu | 1995-06-06 |
| 5213650 | Apparatus for removing deposits from backside and end edge of semiconductor wafer while preventing removal of materials from front surface of wafer | David N. Wang, Mei Chang, Cissy Leung | 1993-05-25 |
| 5075256 | Process for removing deposits from backside and end edge of semiconductor wafer while preventing removal of materials from front surface of wafer | David N. Wang, Mei Chang, Cissy Leung | 1991-12-24 |
| 4714536 | Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields | Kenneth F. Freeman, Charles B. Garrett, David J. Harra | 1987-12-22 |