Issued Patents All Time
Showing 76–91 of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6991526 | Control of removal profile in electrochemically assisted CMP | Lizhong Sun, Liang-Yuh Chen, Siew Neo, Alain Duboust, Stan Tsai +1 more | 2006-01-31 |
| 6979248 | Conductive polishing article for electrochemical mechanical polishing | Yongqi Hu, Yan Wang, Alain Duboust, Rashid Mavliev, Liang-Yuh Chen +2 more | 2005-12-27 |
| 6962524 | Conductive polishing article for electrochemical mechanical polishing | Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Antoine P. Manens, Rashid Mavliev +5 more | 2005-11-08 |
| 6899804 | Electrolyte composition and treatment for electrolytic chemical mechanical polishing | Alain Duboust, Lizhong Sun, Yuchun Wang, Yan Wang, Siew Neo +1 more | 2005-05-31 |
| 6863797 | Electrolyte with good planarization capability, high removal rate and smooth surface finish for electrochemically controlled copper CMP | Lizhong Sun, Siew Neo, Stan Tsai, Liang-Yuh Chen | 2005-03-08 |
| 6849696 | Low dielectric constant organic dielectrics based on cage-like structures | Kreisler Lau, Boris Korolev, Emma Brouk, Roger Leung | 2005-02-01 |
| 6821881 | Method for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Lizhong Sun, Shijian Li, Rashid Mavliev +2 more | 2004-11-23 |
| 6803441 | Compositions and methods for thermosetting molecules in organic compositions | Kreisler Lau, Boris Korolev, Emma Brouk, Ruslan Zherebin, David Nalewajek | 2004-10-12 |
| 6797777 | Low dielectric constant organic dielectrics based on cage-like structures | Kreisler Lau, Boris Korolev, Emma Brouk, Rusian Zherebin, Roger Leung | 2004-09-28 |
| 6776693 | Method and apparatus for face-up substrate polishing | Alain Duboust, Shou-Sung Chang, Liang-Yuh Chen, Yan Wang, Siew Neo +1 more | 2004-08-17 |
| 6736992 | Chemical mechanical planarization of low dielectric constant materials | Fan Zhang, Dan Towery | 2004-05-18 |
| 6713590 | Low dielectric constant materials with polymeric networks | Kreisler Lau, Boris Korolev, Emma Brouk, Ruslan Zherebin, David Nalewajek | 2004-03-30 |
| 6509415 | Low dielectric constant organic dielectrics based on cage-like structures | Kreisler Lau, Boris Korolev, Emma Brouk, Rusian Zherebin, Roger Leung | 2003-01-21 |
| 6469123 | Compositions and methods for thermosetting molecules in organic compositions | Kreisler Lau, Boris Korolev, Emma Brouk, Ruslan Zherebin, David Nalewajek | 2002-10-22 |
| 6423811 | Low dielectric constant materials with polymeric networks | Kreisler Lau, Boris Korolev, Emma Brouk, Ruslan Zherebin, David Nalewajek | 2002-07-23 |
| 6416685 | Chemical mechanical planarization of low dielectric constant materials | Fan Zhang, Dan Towery | 2002-07-09 |