Issued Patents All Time
Showing 51–66 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075952 | Power loading substrates to reduce particle contamination | Dong-Kil Yim, John M. White, Soo Young Choi, Han Byoul Kim, Jin Man Ha | 2011-12-13 |
| 8076222 | Microcrystalline silicon thin film transistor | Tae Kyung Won, Soo Young Choi, Dong-Kil Yim, Jriyan Jerry Chen | 2011-12-13 |
| 8074599 | Plasma uniformity control by gas diffuser curvature | Soo Young Choi, John M. White, Robin L. Tiner | 2011-12-13 |
| 8075690 | Diffuser gravity support | Ernst Keller, John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi +1 more | 2011-12-13 |
| 8026759 | Multistage amplifying circuit | Michael Choi, Ho Jin Park, Eun Seok Shin, Kyoung-jun Moon, Seung-Hoon Lee +3 more | 2011-09-27 |
| 7902991 | Frequency monitoring to detect plasma process abnormality | Soo Young Choi, John M. White, Hong Soon Kim, James Hoffman | 2011-03-08 |
| 7884035 | Method of controlling film uniformity and composition of a PECVD-deposited A-SiNx : H gate dielectric film deposited over a large substrate surface | Soo Young Choi, Tae Kyung Won, John M. White | 2011-02-08 |
| 7833885 | Microcrystalline silicon thin film transistor | Tae Kyung Won, Soo Young Choi, Dong-Kil Yim, Jriyan Jerry Chen | 2010-11-16 |
| 7785672 | Method of controlling the film properties of PECVD-deposited thin films | Soo Young Choi, John M. White, Qunhua Wang | 2010-08-31 |
| 7732010 | Method for supporting a glass substrate to improve uniform deposition thickness | Soo Young Choi, Quanyuan Shang, Robert I. Greene, John M. White, Dong-Kil Yim +2 more | 2010-06-08 |
| 7589031 | Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films | Suhail Anwar, Chung-Hee Park, Han Byoul Kim, Soo Young Choi, John M. White | 2009-09-15 |
| 7534301 | RF grounding of cathode in process chamber | John M. White, Robin L. Tiner, Wendell T. Blonigan | 2009-05-19 |
| 7429410 | Diffuser gravity support | Ernst Keller, John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi +1 more | 2008-09-30 |
| 7199061 | Pecvd silicon oxide thin film deposition | Soo Young Choi, Quanyuan Shang | 2007-04-03 |
| 7125758 | Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors | Soo Young Choi, Tae Kyung Won, Gaku Furuta, Qunhua Wang, John M. White | 2006-10-24 |
| 6825134 | Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow | Kam S. Law, Quanyuan Shang, William Harshbarger, Dan Maydan, Soo Young Choi +2 more | 2004-11-30 |