Issued Patents All Time
Showing 26–50 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449809 | Interface adhesion improvement method | Young Jin Choi, Jrjyan Jerry CHEN, Soo Young Choi | 2016-09-20 |
| D756502 | Gas diffuser assembly | Dongsuh Lee, Yi Cui, William N. Sterling | 2016-05-17 |
| 9287137 | Methods for depositing a silicon containing layer with argon gas dilution | Qunhua Wang, Weijie Wang, Young Jin Choi, Seon-Mee Cho, Yi Cui +1 more | 2016-03-15 |
| 9269923 | Barrier films for thin film encapsulation | Young Jin Choi, Soo Young Choi | 2016-02-23 |
| 9230796 | A-Si seasoning effect to improve SiN run-to-run uniformity | Gaku Furuta, Soo Young Choi, Young Jin Choi, Omori Kenji | 2016-01-05 |
| 9200368 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2015-12-01 |
| 9039864 | Off-center ground return for RF-powered showerhead | Jonghoon Baek, Sam Kim | 2015-05-26 |
| 8999847 | a-Si seasoning effect to improve SiN run-to-run uniformity | Gaku Furuta, Soo Young Choi, Young Jin Choi, Omori Kenji | 2015-04-07 |
| 8906813 | SiOx process chemistry development using microwave plasma CVD | Tae Kyung Won, Seon-Mee Cho, Soo Young Choi, Dong-Kil Yim, John M. White +1 more | 2014-12-09 |
| 8901015 | Method for depositing an inorganic encapsulating film | Jrjyan Jerry CHEN, Tae Kyung Won, Young Jin Choi, Soo Young Choi | 2014-12-02 |
| 8883269 | Thin film deposition using microwave plasma | Tae Kyung Won, Helinda NOMINANDA, Seon-Mee Cho, Soo Young Choi, John M. White +2 more | 2014-11-11 |
| 8875657 | Balancing RF bridge assembly | Jonghoon Baek, Sam Kim | 2014-11-04 |
| 8853098 | Substrate support with gas introduction openings | Sam Kim, John M. White, Soo Young Choi, Carl A. Sorensen, Robin L. Tiner | 2014-10-07 |
| 8674844 | Detecting plasma chamber malfunction | Hong Soon Kim, Soo Young Choi, James Hoffman, Suhail Anwar, John M. White | 2014-03-18 |
| 8670857 | Flexible process condition monitoring | Hong Soon Kim, James Hoffman | 2014-03-11 |
| 8430961 | Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber | Young Jin Choi, Robin L. Tiner, Sam Kim, Soo Young Choi, John M. White +1 more | 2013-04-30 |
| 8381677 | Prevention of film deposition on PECVD process chamber wall | Robin L. Tiner, Soo Young Choi, John M. White | 2013-02-26 |
| 8372205 | Reducing electrostatic charge by roughening the susceptor | Soo Young Choi, Quanyuan Shang, John M. White, Dong-Kil Yim, Chung-Hee Park | 2013-02-12 |
| 8361549 | Power loading substrates to reduce particle contamination | Dong-Kil Yim, John M. White, Soo Young Choi, Han Byoul Kim, Jin Man Ha | 2013-01-29 |
| 8173228 | Particle reduction on surfaces of chemical vapor deposition processing apparatus | Soo Young Choi, John M. White, Dong-Kil Yim | 2012-05-08 |
| 8174400 | Frequency monitoring to detect plasma process abnormality | Soo Young Choi, John M. White, Hong Soon Kim, James Hoffman | 2012-05-08 |
| 8147614 | Multi-gas flow diffuser | John M. White, Carl A. Sorensen, Robin L. Tiner, Soo Young Choi | 2012-04-03 |
| 8142606 | Apparatus for depositing a uniform silicon film and methods for manufacturing the same | Soo Young Choi, Tae Kyung Won, John M. White | 2012-03-27 |
| 8110453 | Low temperature thin film transistor process, device property, and device stability improvement | Ya-Tang Yang, Tae Kyung Won, Soo Young Choi, John M. White | 2012-02-07 |
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2011-12-27 |