| 9159910 |
One-mask MTJ integration for STT MRAM |
Seung H. Kang, Kangho Lee |
2015-10-13 |
| 8933567 |
Electrically broken, but mechanically continuous die seal for integrated circuits |
Thomas Andrew Myers |
2015-01-13 |
| 8483997 |
Predictive modeling of contact and via modules for advanced on-chip interconnect technology |
Xia Li, Wei Zhao, Yu Cao, Seung H. Kang, Matthew Michael Nowak |
2013-07-09 |
| 8207569 |
Intertwined finger capacitors |
— |
2012-06-26 |
| 7973541 |
Method and apparatus for estimating resistance and capacitance of metal interconnects |
Jayakannan Jayapalan, Yang Du |
2011-07-05 |
| 7675372 |
Circuit simulator parameter extraction using a configurable ring oscillator |
Jayakannan Jayapalan |
2010-03-09 |
| 6380556 |
Test structure used to measure metal bottom coverage in trenches and vias/contacts and method for creating the test structure |
Takeshi Nogami, Guarionex Morales, Shekhar Pramanick |
2002-04-30 |
| 6274915 |
Method of improving MOS device performance by controlling degree of depletion in the gate electrode |
Srinath Krishnan, Ming-Yin Hao, Witold P. Maszara |
2001-08-14 |
| 6268277 |
Method of producing air gap for reducing intralayer capacitance in metal layers in damascene metalization process and product resulting therefrom |
— |
2001-07-31 |
| 6169039 |
Electron bean curing of low-k dielectrics in integrated circuits |
Ming-Ren Lin, Shekhar Pramanick |
2001-01-02 |
| 6127193 |
Test structure used to measure metal bottom coverage in trenches and vias/contacts and method for creating the test structure |
Takeshi Nogami, Guarionex Morales, Shekhar Pramanick |
2000-10-03 |
| 6047243 |
Method for quantifying ultra-thin dielectric reliability: time dependent dielectric wear-out |
Qi Xiang |
2000-04-04 |
| 5953625 |
Air voids underneath metal lines to reduce parasitic capacitance |
— |
1999-09-14 |
| 5949143 |
Semiconductor interconnect structure with air gap for reducing intralayer capacitance in metal layers in damascene metalization process |
— |
1999-09-07 |
| 5643428 |
Multiple tier collimator system for enhanced step coverage and uniformity |
Zoran Krivokapic |
1997-07-01 |
| 5580428 |
PVD sputter system having nonplanar target configuration and methods for constructing same |
Zoran Krivokapic |
1996-12-03 |
| 5556525 |
PVD sputter system having nonplanar target configuration and methods for operating same |
Zoran Krivokapic |
1996-09-17 |