Issued Patents 2025
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228863 | EUV light source contamination monitoring system | Cheng-Hung Tsai, Sheng-Kang Yu, Heng-Hsin Liu, Shang-Chieh Chien | 2025-02-18 |
| 12216413 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-02-04 |
| 12210295 | Reticle cleaning device and method of use | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-01-28 |
| 12210296 | Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Heng-Hsin Liu | 2025-01-28 |
| 12207381 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Ssu-Yu Chen, Shang-Chieh Chien | 2025-01-21 |
| 12189298 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-01-07 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2025-01-07 |
| 12189311 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Jhan-Hong YEH, Han-Lung Chang, Tzung-Chi Fu | 2025-01-07 |