Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420313 | Onsite cleaning system and method | Yen-Hao LIU, Sung-Han Tsai, Li-Jui Chen | 2025-09-23 |
| 12360464 | Lithography system and method thereof | Shao-Hua Wang, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2025-07-15 |
| 12362218 | Substrate holder and methods of use | Yu-Chi Tsai | 2025-07-15 |
| 12283512 | Semiconductor processing method and apparatus | Shuang Deng, Fan-Chi LIN, Li-Jui Chen, Heng-Hsin Liu | 2025-04-22 |
| 12210296 | Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |