Issued Patents 2025
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406884 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Zhimin QI, Yi Xu, Shirish A. PETHE, Xingyao GAO, Shiyu YUE +5 more | 2025-09-02 |
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more | 2025-08-19 |
| D1089130 | Process chamber manifold | Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Dien-Yeh Wu, Jallepally Ravi +3 more | 2025-08-19 |
| 12374568 | One chamber multi-station selective metal removal | Shiyu YUE, Sahil Patel, Wei Lei, Chih-Hsun Hsu, Yi Xu +7 more | 2025-07-29 |
| 12344539 | Plasmon-enhanced catalytic ozonation for recalcitrant water pollutant removal | Tingtang Wu, Wenwen Yang | 2025-07-01 |
| 12318537 | Respiratory apparatus with noise-damping member | Jiebing XU, Haibin Yu, Zhenxiang Hu | 2025-06-03 |
| 12293902 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2025-05-06 |
| 12280217 | Heater plate | Jiebing XU, Haibin Yu, Zhenxiang Hu, Jun Zhao | 2025-04-22 |
| 12272659 | Methods for forming metal gapfill with low resistivity | Yi Xu, Zhimin QI, Aixi ZHANG, Xianyuan ZHAO, Wei Lei +8 more | 2025-04-08 |
| 12230479 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more | 2025-02-18 |
| 12191200 | Methods for minimizing feature-to-feature gap fill height variations | Jiajie Cen, Da He, Yi Xu | 2025-01-07 |