Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142509 | Electrostatic chuck with seal surface | Patrick Breiling, Michael Philip Roberts, Chloe Baldasseroni, Ishtak Karim, Adrien LaVoie | 2024-11-12 |
| 12110586 | Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers | Adrien LaVoie, Michael Philip Roberts, Chloe Baldasseroni, Richard Phillips | 2024-10-08 |
| 12071689 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Michael Philip Roberts, Pulkit Agarwal, Adrien LaVoie, Ravi Kumar, Nuoya Yang +2 more | 2024-08-27 |
| 12062554 | Progressive heating of components of substrate processing systems using TCR element-based heaters | Easwar Srinivasan | 2024-08-13 |
| 12049698 | Systems and methods for reducing effluent build-up in a pumping exhaust system | Antonio Xavier, Steven Goza, Adrien LaVoie, Joseph Nesmith | 2024-07-30 |
| 11959175 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Shankar Swaminathan, Adrien LaVoie, Chloe Baldasseroni +2 more | 2024-04-16 |
| 11959172 | Substrate processing systems including gas delivery system with reduced dead legs | Antonio Xavier, Frank L. Pasquale, Ryan Blaquiere, Jennifer Leigh Petraglia, Meenakshi Mamunuru | 2024-04-16 |
| 11908715 | Dynamic temperature control of substrate support in substrate processing system | Sairam Sundaram, Aaron Durbin | 2024-02-20 |