Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12110586 | Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers | Adrien LaVoie, Michael Philip Roberts, Chloe Baldasseroni, Ramesh Chandrasekharan | 2024-10-08 |