Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142509 | Electrostatic chuck with seal surface | Patrick Breiling, Michael Philip Roberts, Ishtak Karim, Adrien LaVoie, Ramesh Chandrasekharan | 2024-11-12 |
| 12110586 | Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers | Adrien LaVoie, Michael Philip Roberts, Richard Phillips, Ramesh Chandrasekharan | 2024-10-08 |
| 12040181 | Modulated atomic layer deposition | Chan Myae Myae Soe, Shiva Sharan Bhandari, Pulkit Agarwal, Adrien LaVoie, Bart J. van Schravendijk | 2024-07-16 |
| 11959175 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Shankar Swaminathan, Adrien LaVoie, Ramesh Chandrasekharan +2 more | 2024-04-16 |