Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12071689 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Ramesh Chandrasekharan, Michael Philip Roberts, Pulkit Agarwal, Adrien LaVoie, Ravi Kumar +2 more | 2024-08-27 |
| 12040181 | Modulated atomic layer deposition | Chloe Baldasseroni, Shiva Sharan Bhandari, Pulkit Agarwal, Adrien LaVoie, Bart J. van Schravendijk | 2024-07-16 |