Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12071689 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Ramesh Chandrasekharan, Michael Philip Roberts, Adrien LaVoie, Ravi Kumar, Nuoya Yang +2 more | 2024-08-27 |
| 12057300 | Apparatus for cleaning plasma chambers | Adrien LaVoie, Frank L. Pasquale, Purushottam Kumar | 2024-08-06 |
| 12040181 | Modulated atomic layer deposition | Chan Myae Myae Soe, Chloe Baldasseroni, Shiva Sharan Bhandari, Adrien LaVoie, Bart J. van Schravendijk | 2024-07-16 |
| 11913113 | Method and apparatus for modulating film uniformity | Adrien LaVoie, Purushottam Kumar | 2024-02-27 |