Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057300 | Apparatus for cleaning plasma chambers | Adrien LaVoie, Pulkit Agarwal, Purushottam Kumar | 2024-08-06 |
| 11959172 | Substrate processing systems including gas delivery system with reduced dead legs | Ramesh Chandrasekharan, Antonio Xavier, Ryan Blaquiere, Jennifer Leigh Petraglia, Meenakshi Mamunuru | 2024-04-16 |
| 11959175 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Shankar Swaminathan, Adrien LaVoie, Chloe Baldasseroni +2 more | 2024-04-16 |