Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11959172 | Substrate processing systems including gas delivery system with reduced dead legs | Ramesh Chandrasekharan, Antonio Xavier, Frank L. Pasquale, Ryan Blaquiere, Jennifer Leigh Petraglia | 2024-04-16 |