Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12049698 | Systems and methods for reducing effluent build-up in a pumping exhaust system | Steven Goza, Ramesh Chandrasekharan, Adrien LaVoie, Joseph Nesmith | 2024-07-30 |
| 11959172 | Substrate processing systems including gas delivery system with reduced dead legs | Ramesh Chandrasekharan, Frank L. Pasquale, Ryan Blaquiere, Jennifer Leigh Petraglia, Meenakshi Mamunuru | 2024-04-16 |