Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125705 | Method for providing doped silicon using a diffusion barrier layer | Gengwei Jiang, Bart J. van Schravendijk, Tengfei Miao, Joseph R. Abel, Adrien LaVoie | 2024-10-22 |
| 12077859 | Variable cycle and time RF activation method for film thickness matching in a multi-station deposition system | Ishtak Karim, Kiyong Cho, Adrien LaVoie, Jaswinder Guliani, Jun Qian | 2024-09-03 |
| 12057300 | Apparatus for cleaning plasma chambers | Adrien LaVoie, Pulkit Agarwal, Frank L. Pasquale | 2024-08-06 |
| 12049699 | Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching | Joseph R. Abel, Bart J. van Schravendijk, Adrien LaVoie | 2024-07-30 |
| 12020923 | Low-κ ALD gap-fill methods and material | Joseph R. Abel, Douglas Walter Agnew, Adrien LaVoie, Ian John Curtin | 2024-06-25 |
| 11970772 | Dynamic precursor dosing for atomic layer deposition | Adrien LaVoie, Jun Qian, Hu Kang, Ishtak Karim, Fung Suong Ou | 2024-04-30 |
| 11913113 | Method and apparatus for modulating film uniformity | Pulkit Agarwal, Adrien LaVoie | 2024-02-27 |