Issued Patents 2024
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169925 | System using film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Kiran Shrestha | 2024-12-17 |
| 12136574 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian +1 more | 2024-11-05 |
| 12099436 | Application performance monitoring for monolithic applications and distributed systems | Fuheng Wu, Ivan Dimitrov Davchev | 2024-09-24 |
| 12090599 | Determination of substrate layer thickness with polishing pad wear compensation | Kun Xu, Benjamin Cherian, Kiran Shrestha | 2024-09-17 |
| 12077859 | Variable cycle and time RF activation method for film thickness matching in a multi-station deposition system | Ishtak Karim, Kiyong Cho, Adrien LaVoie, Jaswinder Guliani, Purushottam Kumar | 2024-09-03 |
| 12057354 | Trained neural network in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian +1 more | 2024-08-06 |
| 12020159 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Thomas H. Osterheld | 2024-06-25 |
| 11989964 | Techniques for graph data structure augmentation | Amit Agarwal, Kulbhushan Pachauri, Iman Zadeh | 2024-05-21 |
| 11989492 | Preston matrix generator | Sivakumar Dhandapani, Thomas Li | 2024-05-21 |
| 11970772 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Hu Kang, Ishtak Karim, Fung Suong Ou | 2024-04-30 |
| 11919748 | Hoist for transferred materials in underground auxiliary transportation system and method thereof | Chi Ma, Yuxing Peng, Zhencai Zhu, Meilin Wang, Changhua Hu +6 more | 2024-03-05 |