Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020159 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Jun Qian | 2024-06-25 |
| 11931853 | Control of processing parameters for substrate polishing with angularly distributed zones using cost function | Eric Lau, Charles C. Garretson, Huanbo Zhang, Zhize Zhu, Benjamin Cherian +1 more | 2024-03-19 |
| 11931860 | Consumable part monitoring in chemical mechanical polisher | Dominic J. Benvegnu | 2024-03-19 |