Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169925 | System using film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Jun Qian, Kiran Shrestha | 2024-12-17 |
| 12148148 | Thickness measurement of substrate using color metrology | — | 2024-11-19 |
| 11931860 | Consumable part monitoring in chemical mechanical polisher | Thomas H. Osterheld | 2024-03-19 |