Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169925 | System using film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian | 2024-12-17 |
| 12166099 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Petri Raisanen, Michael Eugene Givens | 2024-12-10 |
| 12136574 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2024-11-05 |
| 12090599 | Determination of substrate layer thickness with polishing pad wear compensation | Kun Xu, Benjamin Cherian, Jun Qian | 2024-09-17 |
| 12057354 | Trained neural network in in-situ monitoring during polishing and polishing system | Kun Xu, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2024-08-06 |
| 11908736 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2024-02-20 |