Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136574 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more | 2024-11-05 |
| 12057354 | Trained neural network in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more | 2024-08-06 |
| 11948885 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli +3 more | 2024-04-02 |
| 11865664 | Profile control with multiple instances of contol algorithm during polishing | Kun Xu, Harry Q. Lee, Benjamin Cherian | 2024-01-09 |