Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169925 | System using film thickness estimation from machine learning based processing of substrate images | Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian, Kiran Shrestha | 2024-12-17 |
| 11989492 | Preston matrix generator | Thomas Li, Jun Qian | 2024-05-21 |
| 11969854 | Control of processing parameters during substrate polishing using expected future parameter changes | Benjamin Cherian | 2024-04-30 |
| 11969855 | Filtering during in-situ monitoring of polishing | — | 2024-04-30 |
| 11919121 | Control of processing parameters during substrate polishing using constrained cost function | Benjamin Cherian | 2024-03-05 |