Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077859 | Variable cycle and time RF activation method for film thickness matching in a multi-station deposition system | Ishtak Karim, Kiyong Cho, Adrien LaVoie, Purushottam Kumar, Jun Qian | 2024-09-03 |